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🔬 Lithography: Rayleigh Resolution, Depth of Focus and Aerial Image (2D)

Projection lithography reduced to its essentials: a line and space mask diffracts light, and the lens only collects the orders that fit inside its aperture. Set the wavelength, numerical aperture, immersion index, the half-pitch to print, the off-axis tilt and the defocus, and see the resolution limit, the depth of focus, the aerial image and the contrast. The Rayleigh limit, the Airy spot, the depth of focus and the energy of the image are checked numerically, with four in-page numerical checks.

Electronics & Circuits2DModerate60 FPS📱 Mobile-adapted🤖 ChatGPT⇄ 3D version
Lithography: Rayleigh Resolution, Depth of Focus and Aerial Image (2D) ↗ Open standalone
⚙ Under the hood

Projection lithography reduced to its essentials: a line and space mask diffracts light, and the lens only collects the orders that fit inside its aperture. Set the wavelength, numerical aperture, immersion index, the half-pitch to print, the off-axis tilt and the defocus, and see the resolution limit, the depth of focus, the aerial image and the contrast. The Rayleigh limit, the Airy spot, the depth of focus and the energy of the image are checked numerically, with four in-page numerical checks.

photolithographyRayleigh criteriondepth of focusnumerical apertureaerial image

2D · HTML5 Canvas 2D · 60 FPS target · runs fully client-side, no install

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